# UHP 超高纯束缚膜片减压阀 (压力高达 250 psig) – SMSQ2Micro系列

> SMSQ2Micro 减压阀用于狭小空间需要精确压力控制的UHP超高纯使用点应用。提供优秀的可靠性和泄露完整性，使其成为关键的半导体操作的理想选择。

所属技术：仪器仪表

## 系列介绍

$19

## 技术参数

| 参数 | 值 | 单位 |
| --- | --- | --- |
| 阀体材料 | 洁净316L不锈钢 |  |
| 压缩构件材料 | 洁净316L不锈钢 |  |
| 隔膜材料 | 哈氏合金 C-22 |  |
| 阀芯材料 | 哈氏合金 C-22 |  |
| 阀座材料 | PCTFE |  |
| 帽材料 | 铜镀镍 |  |
| 螺母材料 | 不锈钢 |  |
| 旋钮材料 | ABS (蓝) (SMSQ2Micro)\<br/\>ABS (黑) (SMSQ2Micro130E), ABS (Black) (SMSQ2Micro130E) |  |
| 爆破压力 | 750 psig (52 barg) |  |
| 可承受压力 | 375 psig (26 barg) |  |
| 流速 | Cv: 0.06 (SMSQ2Micro), 0.15 (SMSQ2Micro130E) |  |
| 内部泄漏率 | \< 5 x 10-8 cc/sec He |  |
| 外部泄漏率 | \< 2 x 10-10 cc/sec He |  |
| 体积 | 0.08 cm3 |  |
| 重量 | 0.9 lb, 0.42 kg |  |
| 表面处理 | 5微英寸粗糙度 |  |
| 最大入口额定压力 | 250 psig / 17 barg |  |
| 出口额定压力 | -10 psig - 60 psig (260 torr - 4.1 barg) |  |
| 最高运行温度 | 66 °C, 150 °F |  |
| 最低运行温度 | -40 °C, -40 °F |  |

## 型号入口（首批）

- [SMSQ2MICRO130E30602](https://hypher.com.cn/products/model/smsq2micro130e30602-d1e4006cf68706b4/index.md)

## 技术资料与 CAD

- [Process Analytical Guide:--4255-PA](https://www.parker.com/content/dam/Parker-com/Literature/Instrumentation-Products-Division/ParkerIPD-Analytical-Products-Guide.pdf)：document
- [Semiconductor Regulator Selection White Paper](https://www.parker.com/content/dam/Parker-com/Literature/Veriflo/veriflo-white-papers/Veriflo%20Selecting%20Semiconductor%20Regulators%20White%20Paper.pdf)：document
- [UHP Surface Mount Regulator SMSQ2Micro Series](https://www.parker.com/content/dam/Parker-com/Literature/Veriflo/Veriflo---pdf-files/25000167_V1_SMSQ2Micro.pdf)：document
- [Veriflo CAD File Locator Guide](https://hypher.com.cn/library-assets/8dcb7bdf2a7f94ba8123bac625e59a89fbbe60deb89b4ab15ed50404b80d3d6f.pdf)：document
- [Veriflo Pressure Regulators - Installation, Operation and Recycling Guide](https://www.parker.com/content/dam/Parker-com/Literature/Veriflo/Veriflo---pdf-files/25000169_Pressure_Regulators_IOR.pdf)：document
- [Veriflo Product Selection & Operation Safety Guide](https://hypher.com.cn/library-assets/9f24b3c889937098b6c093a3d87b4fc6b7af37f0be54d6163d0a7863666b00fb.pdf)：document
- [Veriflo Semiconductor Explainer Video](https://www.parker.com/content/dam/videos/fcg/veriflo-division/Veriflo%20Semiconductor%20Video.mp4)：document
- [Veriflo--SMSQ2Micro Flow Curve](https://www.parker.com/content/dam/Parker-com/Literature/Veriflo/Veriflo-Flow-Curves/SMSQ2Micro%20Flow%20Curve.pdf)：document

资料来源：[原始系列资料](https://ph.parker.com/cn/zh/product-list/surface-mount-regulator-smsq2micro-series)

价格、库存和交期请联系上海海费确认。更多型号和资料见 [完整系列页面](https://hypher.com.cn/products/instrumentation/surface-mount-regulator-smsq2micro-series)；[联系技术支持](https://hypher.com.cn/contact)